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Abstract: In this paper, we present a high fill-factor micromirror array actuated by self-aligned vertical electrostatic combdrives. To meet the requirements of applications in free-space ...

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Abstract: The requirement for Tungsten (W) seamless gap-fill becomes more critical and more challenging as the semiconductor industry moves to 10nm and beyond. Few reports can be found discussing the ...

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Download and save the PDF to your computer Open the downloaded PDF in Acrobat Reader 10 or later Universities outside of Canada certify a student's eligibility for the tuition, education, and textbook ...