TSMC and the U.S. Department of Commerce finalized a deal Friday, granting TSMC $6.6 billion in funding and $5 billion in loan guarantees under the CHIPS Act to build its Fab 21 site in Arizona.

The U.S. Commerce Department said Friday it has finalized a $6.6 billion government subsidy for Taiwan Semiconductor Manufacturing Co's U.S. unit for semiconductor production in Phoenix, Arizona.

Under the agreement, the chipmaker will receive up to $6.6 billion worth of grants to finance a fab complex it’s currently building in Arizona. TSMC also has the option to access up to $5 billion in loans.